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Fused Silica

Product Information
Fused Silica is available in different quality levels for use in microlithographic applications, such as stepper lenses, as is the first choice material for DUV laser components and other technical applications (248, 193 nm)

Lithosil® Fused Silica:
High quality synthetic fused silica with excellent optical properties for highly demanding applications in the optical industry. The different quality levels of Q can be adapted to all kinds of individual customers' needs from VIS to DUV.

Grades:
Lithosil® standard grades exhibit remarkable transmittance, refractive index homogeneity and internal quality. Q-T is recommended for technical applications.
 
Excimer grades:
With their high DUV laser damage threshold and low fluorescence, Lithosil® Excimer grades for 248 nm and 193 nm are first choice material for DUV laser components and equivalent applications.
 
Lithography:
Melted with improved process technology, Lithosil® is used for microlithographic applications, such as stepper lenses.